Funk, Merritt: search on Z-Library

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1

Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge

Xu, Lin, Chen, Lee, Funk, Merritt, Ranjan, Alok, Hummel, Mike, Bravenec, Ron, Sundararajan, Radha, Economou, Demetre J., Donnelly, Vincent M.

Journal:

Applied Physics Letters

Year:

2008

Language:

english

File:

PDF, 395 KB

english, 2008

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Metrology, Inspection, and Process Control for Microlithography XXIII - Increased uniformity control in a 45nm polysilicon gate etch process

Parkinson, Blake, Allgair, John A., Raymond, Christopher J., Prager, Dan, Funk, Merritt, Sundararajan, Radha, Yamashita, Asao, Bandy, Kenneth, Meyette, Eric

Year:

2009

Language:

english

File:

PDF, 694 KB

english, 2009

3

Measurement of electron temperatures and electron energy distribution functions in dual frequency capacitively coupled CF[sub 4]/O[sub 2] plasmas using trace rare gases optical emission spectroscopy

Chen, Zhiying, Donnelly, Vincent M., Economou, Demetre J., Chen, Lee, Funk, Merritt, Sundararajan, Radha

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2009

Language:

english

File:

PDF, 1.02 MB

english, 2009

4

SPIE Proceedings [SPIE Design, Process Integration, and Characterization for Microelectronics - Santa Clara, CA (Wednesday 6 March 2002)] Design, Process Integration, and Characterization for Microelectronics - Common APC architecture for 200- and 300-mm etch

Funk, Merritt, Lally, Kevin, Sundararajan, Radha, Starikov, Alexander, Tobin, Jr., Kenneth W.

Year:

2002

Language:

english

File:

PDF, 126 KB

english, 2002

5

End-boundary sheath potential, electron and ion energy distribution in the low-pressure non-ambipolar electron plasma

Chen, Lee, Chen, Zhiying, Funk, Merritt

Journal:

Plasma Sources Science and Technology

Year:

2013

Language:

english

File:

PDF, 884 KB

english, 2013

6

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Metrology, Inspection, and Process Control for Microlithography XX - Integrated scatterometry in high-volume manufacturing for polysilicon gate etch control

Sendelbach, Matthew, Munoz, Andres, Bandy, Kenneth A., Prager, Dan, Funk, Merritt, Archie, Chas N.

Year:

2006

Language:

english

File:

PDF, 676 KB

english, 2006

7

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Metrology, Inspection, and Process Control for Microlithography XVIII - Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control

Sendelbach, Matthew, Natzle, Wesley, Archie, Charles N., Banke, Bill, Prager, Dan, Engelhard, Dan, Ferns, Jason, Yamashita, Asao, Funk, Merritt, Higuchi, Fumihiko, Tomoyasu, Masayuki, Silver, Richard

Year:

2004

Language:

english

File:

PDF, 243 KB

english, 2004

8

[IEEE 2006 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2006.09.25-2006.09.27)] 2006 IEEE International Symposium on Semiconductor Manufacturing - Integrated ODP metrology as an APC enabler for complex high aspect ratio 3D deep trench device structures

Schmidt, Barbara, Reinig, Peter, Komarov, Serguei, Hetzer, Dave, Likhachev, Dmitriy, Funk, Merritt

Year:

2006

Language:

english

File:

PDF, 2.72 MB

english, 2006

9

Influence of propane on CO2/CH4 and N2/CH4 separations in CHA zeolite membranes

Wu, Ting, Diaz, Merritt C., Zheng, Yihong, Zhou, Rongfei, Funke, Hans H., Falconer, John L., Noble, Richard D.

Journal:

Journal of Membrane Science

Year:

2015

Language:

english

File:

PDF, 1.06 MB

english, 2015

10

The isolation of hydrouracil from beef spleen

Casimir Funk, A. Jay Merritt, Arthur Ehrlich

Journal:

Archives of Biochemistry and Biophysics

Year:

1952

Language:

english

File:

PDF, 76 KB

english, 1952

11

SPIE Proceedings [SPIE Electronic Imaging 2008 - San Jose, CA (Sunday 27 January 2008)] Stereoscopic Displays and Applications XIX - Hologlyphics: volumetric image synthesis performance system

Funk, Walter, Woods, Andrew J., Holliman, Nicolas S., Merritt, John O.

Year:

2008

Language:

english

File:

PDF, 1.62 MB

english, 2008

12

Direct current-self-sustained non-ambipolar plasma at low pressure

Chen, Zhiying, Chen, Lee, Funk, Merritt

Journal:

Applied Physics Letters

Year:

2013

Language:

english

File:

PDF, 1.50 MB

english, 2013

13

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - Advanced profile control and the impact of sidewall angle at gate etch for critical nodes

Lee, Hyung, Allgair, John A., Raymond, Christopher J., Ranjan, Alok, Prager, Dan, Bandy, Kenneth A., Meyette, Eric, Sundararajan, Radha, Viswanathan, Anita, Yamashita, Asao, Funk, Merritt

Year:

2008

Language:

english

File:

PDF, 654 KB

english, 2008

14

[IEEE 2015 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting - Vancouver, BC, Canada (2015.7.19-2015.7.24)] 2015 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting - Propagation and scattering in a microwave plasma chamber

Peterson, Eric, Katta, Vijay, Venkataraman, Jayanti, Funk, Merritt, Doppel, Megan, Zhao, Jianping

Year:

2015

Language:

english

File:

PDF, 424 KB

english, 2015

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